DOI

  • A. A. Andreev
  • J. Limpouch
  • N. B. Voznesensky
  • A. P. Zhevlakov
  • V. E. Yashin

The advantages of droplet and claster Li-contained targets for debris free EUV generation are estimated on base of analytical modeling and simulation. Conversion efficiency of laser energy into EUV energy from such targets is found to reach a few percents. The laser prepulse is proposed to enhance the laser energy conversion into emission at wavelength of 13.5 nm.

Original languageEnglish
Pages (from-to)128-136
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5196
DOIs
StatePublished - 2004
EventLaser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications - San Diego, CA, United States
Duration: 4 Aug 2003 → 6 Aug 2003

    Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

    Research areas

  • Amplifier, Claster, Conversion, Droplet, Laser produced plasma, Line emission, Master oscillator, Nanolithography

ID: 86382080