Research output: Contribution to journal › Article › peer-review
It is shown that the creation of fast electrons by reactions involving metastable atoms may dramatically increase the near-wall potential drop in the afterglow of an rf-driven plasma. This results in a corresponding increase in the energy of ions incident on the walls of the discharge. This effect may be important in applications such as rf plasma processing.
Original language | English |
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Article number | 4 |
Pages (from-to) | 5350-5353 |
Number of pages | 4 |
Journal | Physics of Plasmas |
Volume | 11 |
Issue number | 11 |
DOIs | |
State | Published - 1 Nov 2004 |
ID: 52198893