DOI

It is shown that the creation of fast electrons by reactions involving metastable atoms may dramatically increase the near-wall potential drop in the afterglow of an rf-driven plasma. This results in a corresponding increase in the energy of ions incident on the walls of the discharge. This effect may be important in applications such as rf plasma processing.

Original languageEnglish
Article number4
Pages (from-to)5350-5353
Number of pages4
JournalPhysics of Plasmas
Volume11
Issue number11
DOIs
StatePublished - 1 Nov 2004

    Scopus subject areas

  • Condensed Matter Physics

ID: 52198893