DOI

It is shown that the creation of fast electrons by reactions involving metastable atoms may dramatically increase the near-wall potential drop in the afterglow of an rf-driven plasma. This results in a corresponding increase in the energy of ions incident on the walls of the discharge. This effect may be important in applications such as rf plasma processing.

Язык оригиналаанглийский
Номер статьи4
Страницы (с-по)5350-5353
Число страниц4
ЖурналPhysics of Plasmas
Том11
Номер выпуска11
DOI
СостояниеОпубликовано - 1 ноя 2004

    Предметные области Scopus

  • Физика конденсатов

ID: 52198893