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Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma. / Demidov, V. I.; DeJoseph, C. A.; Kudryavtsev, A. A.

In: Physics of Plasmas, Vol. 11, No. 11, 4, 01.11.2004, p. 5350-5353.

Research output: Contribution to journal › Article › peer-review

Harvard

Demidov, VI, DeJoseph, CA & Kudryavtsev, AA 2004, 'Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma', Physics of Plasmas, vol. 11, no. 11, 4, pp. 5350-5353. https://doi.org/10.1063/1.1795844

APA

Demidov, V. I., DeJoseph, C. A., & Kudryavtsev, A. A. (2004). Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma. Physics of Plasmas, 11(11), 5350-5353. [4]. https://doi.org/10.1063/1.1795844

Vancouver

Demidov VI, DeJoseph CA, Kudryavtsev AA. Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma. Physics of Plasmas. 2004 Nov 1;11(11):5350-5353. 4. https://doi.org/10.1063/1.1795844

Author

Demidov, V. I. ; DeJoseph, C. A. ; Kudryavtsev, A. A. / Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma. In: Physics of Plasmas. 2004 ; Vol. 11, No. 11. pp. 5350-5353.

BibTeX

@article{eb4867a118c2438cb6d0147c6ff53432,
title = "Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma",
abstract = "It is shown that the creation of fast electrons by reactions involving metastable atoms may dramatically increase the near-wall potential drop in the afterglow of an rf-driven plasma. This results in a corresponding increase in the energy of ions incident on the walls of the discharge. This effect may be important in applications such as rf plasma processing.",
author = "Demidov, {V. I.} and DeJoseph, {C. A.} and Kudryavtsev, {A. A.}",
year = "2004",
month = nov,
day = "1",
doi = "10.1063/1.1795844",
language = "English",
volume = "11",
pages = "5350--5353",
journal = "Physics of Plasmas",
issn = "1070-664X",
publisher = "American Institute of Physics",
number = "11",

}

RIS

TY - JOUR

T1 - Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma

AU - Demidov, V. I.

AU - DeJoseph, C. A.

AU - Kudryavtsev, A. A.

PY - 2004/11/1

Y1 - 2004/11/1

N2 - It is shown that the creation of fast electrons by reactions involving metastable atoms may dramatically increase the near-wall potential drop in the afterglow of an rf-driven plasma. This results in a corresponding increase in the energy of ions incident on the walls of the discharge. This effect may be important in applications such as rf plasma processing.

AB - It is shown that the creation of fast electrons by reactions involving metastable atoms may dramatically increase the near-wall potential drop in the afterglow of an rf-driven plasma. This results in a corresponding increase in the energy of ions incident on the walls of the discharge. This effect may be important in applications such as rf plasma processing.

UR - http://www.scopus.com/inward/record.url?scp=10944271735&partnerID=8YFLogxK

U2 - 10.1063/1.1795844

DO - 10.1063/1.1795844

M3 - Article

AN - SCOPUS:10944271735

VL - 11

SP - 5350

EP - 5353

JO - Physics of Plasmas

JF - Physics of Plasmas

SN - 1070-664X

IS - 11

M1 - 4

ER -

ID: 52198893