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Электрофизические свойства многослойной структуры SiC−Si
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peer-review
Department of Solid State Electronics
Nanotechnology Interdisciplinary Centre
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В.Б. Божевольнов
А.М. Яфясов
В.Ю. Миайловский
Ю.В. Егорова
А.А. Соколов
Е.О. Филатова
Original language
Russian
Pages (from-to)
814 - 817
Journal
ФИЗИКА И ТЕХНИКА ПОЛУПРОВОДНИКОВ
Volume
48
Issue number
6
State
Published -
2014
ID: 5692065