Research output: Patenting and IP registration › Patent
| Original language | Russian |
|---|---|
| Patent number | 202920 |
| IPC (International Patent Classification) | C23C 14/22 (2006.01),C23C 14/12 (2006.01) |
| Priority date | 16/11/20 |
| Filing date | 16/11/20 |
| State | Published - 15 Mar 2021 |
ID: 74986644