Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Synthesis of Au/Si nanostructures by STM lithography. / Lebedev, D. V.; Shkoldin, V. A.; Mozharov, A. M.; Petukhov, A. E.; Golubok, A. O.; Arkhipov, Arkhipov A. V.; Mukhin, I. S.; Дубровский, Владимир Германович.
в: Technical Physics Letters, Том 48, № 6, 17.03.2023, стр. 47-50.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
}
TY - JOUR
T1 - Synthesis of Au/Si nanostructures by STM lithography
AU - Lebedev, D. V.
AU - Shkoldin, V. A.
AU - Mozharov, A. M.
AU - Petukhov, A. E.
AU - Golubok, A. O.
AU - Arkhipov, Arkhipov A. V.
AU - Mukhin, I. S.
AU - Дубровский, Владимир Германович
PY - 2023/3/17
Y1 - 2023/3/17
N2 - A technique for synthesizing nanostructures by current lithography in a scanning tunneling microscope (STM lithography) in layered Au/Si structures has been developed. An experimental dependence of the geometric dimensions of the created nanostructures on the time of current STM lithography has been obtained. A theoretical model for the growth of nanostructures is proposed, which explains the nonlinear dependence of the radius of the obtained nanostructures on time with saturation in the region of large radii. Keywords: Au/Si nanostructures, STM lithography, growth rate, modeling.
AB - A technique for synthesizing nanostructures by current lithography in a scanning tunneling microscope (STM lithography) in layered Au/Si structures has been developed. An experimental dependence of the geometric dimensions of the created nanostructures on the time of current STM lithography has been obtained. A theoretical model for the growth of nanostructures is proposed, which explains the nonlinear dependence of the radius of the obtained nanostructures on time with saturation in the region of large radii. Keywords: Au/Si nanostructures, STM lithography, growth rate, modeling.
UR - https://www.mendeley.com/catalogue/1b10d84c-2a6c-3a05-b0cd-43158739c758/
U2 - 10.21883/TPL.2022.06.53790.19224
DO - 10.21883/TPL.2022.06.53790.19224
M3 - Article
VL - 48
SP - 47
EP - 50
JO - Technical Physics Letters
JF - Technical Physics Letters
SN - 1063-7850
IS - 6
ER -
ID: 106600125