Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Selective Area HVPE of InGaAs Nanowires with Widely Tunable Composition on Si Substrates for Nanoscale Device Integration on Si Platforms. / Chereau, Emmanuel; Dubrovskii, Vladimir G.; Diak, Ethan; Semlali, Elias; Avit, Geoffrey; Trassoudaine, Agnès; Gil, Evelyne; LaPierre, Ray; André, Yamina.
в: ACS Applied Nano Materials, Том 7, № 15, 29.07.2024, стр. 17417–17423.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Selective Area HVPE of InGaAs Nanowires with Widely Tunable Composition on Si Substrates for Nanoscale Device Integration on Si Platforms
AU - Chereau, Emmanuel
AU - Dubrovskii, Vladimir G.
AU - Diak, Ethan
AU - Semlali, Elias
AU - Avit, Geoffrey
AU - Trassoudaine, Agnès
AU - Gil, Evelyne
AU - LaPierre, Ray
AU - André, Yamina
PY - 2024/7/29
Y1 - 2024/7/29
N2 - Nanowires (NWs) are promising for the integration of III-V compound-based electrical and optical devices on Si. Selective area growth (SAG) of InxGa1-xAs NWs with compositions x varying from 0.34 to 0.90 is achieved. NWs are grown on patterned Si(111) substrates by hydride vapor phase epitaxy (HVPE) at temperatures around 690 °C. The composition is measured using EDX profiles along their lengths and found to be quite homogeneous. Theoretical analysis revealed that the NW composition is kinetically controlled and well-fit by the one-parametric Langmuir-McLean formula, with no thermodynamic factors influencing the compositional trend. This study highlights the capability of catalyst-free HVPE SAG to grow highly uniform InGaAs NW arrays with a widely tunable composition on Si substrates.
AB - Nanowires (NWs) are promising for the integration of III-V compound-based electrical and optical devices on Si. Selective area growth (SAG) of InxGa1-xAs NWs with compositions x varying from 0.34 to 0.90 is achieved. NWs are grown on patterned Si(111) substrates by hydride vapor phase epitaxy (HVPE) at temperatures around 690 °C. The composition is measured using EDX profiles along their lengths and found to be quite homogeneous. Theoretical analysis revealed that the NW composition is kinetically controlled and well-fit by the one-parametric Langmuir-McLean formula, with no thermodynamic factors influencing the compositional trend. This study highlights the capability of catalyst-free HVPE SAG to grow highly uniform InGaAs NW arrays with a widely tunable composition on Si substrates.
KW - EDX
KW - HVPE
KW - InGaAs
KW - composition
KW - nanowires
UR - https://www.mendeley.com/catalogue/1f9a0d40-5a8a-320e-9f93-94967ccc2e05/
U2 - DOI: 10.1021/acsanm.4c02466
DO - DOI: 10.1021/acsanm.4c02466
M3 - Article
VL - 7
SP - 17417
EP - 17423
JO - ACS Applied Nano Materials
JF - ACS Applied Nano Materials
SN - 2574-0970
IS - 15
ER -
ID: 124349591