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Secondary electron energy distribution from insulators in helium ion microscope. / Anikeva, A. E.; Petrov, Yu V.; Vyvenko, O. F.

State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. ред. / Yuri Petrov; Oleg Vyvenko. Том 2064 American Institute of Physics, 2019. 020001 (AIP Conference Proceedings; Том 2064).

Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование

Harvard

Anikeva, AE, Petrov, YV & Vyvenko, OF 2019, Secondary electron energy distribution from insulators in helium ion microscope. в Y Petrov & O Vyvenko (ред.), State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. Том. 2064, 020001, AIP Conference Proceedings, Том. 2064, American Institute of Physics, International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018, Moscow, Российская Федерация, 17/10/18. https://doi.org/10.1063/1.5087657

APA

Anikeva, A. E., Petrov, Y. V., & Vyvenko, O. F. (2019). Secondary electron energy distribution from insulators in helium ion microscope. в Y. Petrov, & O. Vyvenko (Ред.), State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018 (Том 2064). [020001] (AIP Conference Proceedings; Том 2064). American Institute of Physics. https://doi.org/10.1063/1.5087657

Vancouver

Anikeva AE, Petrov YV, Vyvenko OF. Secondary electron energy distribution from insulators in helium ion microscope. в Petrov Y, Vyvenko O, Редакторы, State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. Том 2064. American Institute of Physics. 2019. 020001. (AIP Conference Proceedings). https://doi.org/10.1063/1.5087657

Author

Anikeva, A. E. ; Petrov, Yu V. ; Vyvenko, O. F. / Secondary electron energy distribution from insulators in helium ion microscope. State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. Редактор / Yuri Petrov ; Oleg Vyvenko. Том 2064 American Institute of Physics, 2019. (AIP Conference Proceedings).

BibTeX

@inproceedings{c9ee0a0e5fd04d23944de7c47eb64ae7,
title = "Secondary electron energy distribution from insulators in helium ion microscope",
abstract = "Secondary electron emission generated by the impact of positive ions from insulators is generally strongly retarded due unavoidable positive charging of the target hindering the reliable characterization of the materials. Special measurement procedure utilizing a distant single-ion impact is developed and the experimental conditions to avoid the charging are found. The data on secondary electron energy distribution (SEED) in the helium ion microscope for platinum, silicon nitride, and silicon dioxide are presented. It is shown that with the help of the suggested procedure SEED can be determined for any material with a high accuracy.",
keywords = "SCANNING-ELECTRON, EMISSION, PHOTOEMISSION, SILICON, FILMS",
author = "Anikeva, {A. E.} and Petrov, {Yu V.} and Vyvenko, {O. F.}",
year = "2019",
month = jan,
day = "15",
doi = "10.1063/1.5087657",
language = "English",
isbn = "9780735417922",
volume = "2064",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics",
editor = "Yuri Petrov and Oleg Vyvenko",
booktitle = "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018",
address = "United States",
note = "International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018 ; Conference date: 17-10-2018 Through 19-10-2018",

}

RIS

TY - GEN

T1 - Secondary electron energy distribution from insulators in helium ion microscope

AU - Anikeva, A. E.

AU - Petrov, Yu V.

AU - Vyvenko, O. F.

PY - 2019/1/15

Y1 - 2019/1/15

N2 - Secondary electron emission generated by the impact of positive ions from insulators is generally strongly retarded due unavoidable positive charging of the target hindering the reliable characterization of the materials. Special measurement procedure utilizing a distant single-ion impact is developed and the experimental conditions to avoid the charging are found. The data on secondary electron energy distribution (SEED) in the helium ion microscope for platinum, silicon nitride, and silicon dioxide are presented. It is shown that with the help of the suggested procedure SEED can be determined for any material with a high accuracy.

AB - Secondary electron emission generated by the impact of positive ions from insulators is generally strongly retarded due unavoidable positive charging of the target hindering the reliable characterization of the materials. Special measurement procedure utilizing a distant single-ion impact is developed and the experimental conditions to avoid the charging are found. The data on secondary electron energy distribution (SEED) in the helium ion microscope for platinum, silicon nitride, and silicon dioxide are presented. It is shown that with the help of the suggested procedure SEED can be determined for any material with a high accuracy.

KW - SCANNING-ELECTRON

KW - EMISSION

KW - PHOTOEMISSION

KW - SILICON

KW - FILMS

UR - http://www.scopus.com/inward/record.url?scp=85060535360&partnerID=8YFLogxK

UR - http://www.mendeley.com/research/secondary-electron-energy-distribution-insulators-helium-ion-microscope

U2 - 10.1063/1.5087657

DO - 10.1063/1.5087657

M3 - Conference contribution

AN - SCOPUS:85060535360

SN - 9780735417922

VL - 2064

T3 - AIP Conference Proceedings

BT - State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018

A2 - Petrov, Yuri

A2 - Vyvenko, Oleg

PB - American Institute of Physics

T2 - International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018

Y2 - 17 October 2018 through 19 October 2018

ER -

ID: 38712896