DOI

Secondary electron emission generated by the impact of positive ions from insulators is generally strongly retarded due unavoidable positive charging of the target hindering the reliable characterization of the materials. Special measurement procedure utilizing a distant single-ion impact is developed and the experimental conditions to avoid the charging are found. The data on secondary electron energy distribution (SEED) in the helium ion microscope for platinum, silicon nitride, and silicon dioxide are presented. It is shown that with the help of the suggested procedure SEED can be determined for any material with a high accuracy.

Язык оригиналаанглийский
Название основной публикацииState-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018
РедакторыYuri Petrov, Oleg Vyvenko
ИздательAmerican Institute of Physics
Число страниц8
Том2064
ISBN (электронное издание)9780735417922
ISBN (печатное издание)9780735417922
DOI
СостояниеОпубликовано - 15 янв 2019
СобытиеInternational Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018 - Moscow, Российская Федерация
Продолжительность: 17 окт 201819 окт 2018

Серия публикаций

НазваниеAIP Conference Proceedings
ИздательAMER INST PHYSICS
Том2064
ISSN (печатное издание)0094-243X

конференция

конференцияInternational Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018
Страна/TерриторияРоссийская Федерация
ГородMoscow
Период17/10/1819/10/18

    Предметные области Scopus

  • Физика и астрономия (все)

ID: 38712896