DOI

A kinetic theory for the electron probe current is presented. The results allow us to infer the electron energy distribution function from the measured electron probe current and its derivatives over a wide range of pressures and magnetic fields. To recover the electron energy distribution function from probe characteristics two numerical methods are proposed. Probe measurements in a rare gas afterglow plasma were carried out over a wide pressure and energy range. The experimental results are in good agreement with the theory developed in the paper.

Язык оригиналаанглийский
Номер статьи010
Страницы (с-по)528-538
Число страниц11
ЖурналPlasma Sources Science and Technology
Том3
Номер выпуска4
DOI
СостояниеОпубликовано - 1 дек 1994

    Предметные области Scopus

  • Физика конденсатов

ID: 52201175