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A kinetic theory for the electron probe current is presented. The results allow us to infer the electron energy distribution function from the measured electron probe current and its derivatives over a wide range of pressures and magnetic fields. To recover the electron energy distribution function from probe characteristics two numerical methods are proposed. Probe measurements in a rare gas afterglow plasma were carried out over a wide pressure and energy range. The experimental results are in good agreement with the theory developed in the paper.
Original language | English |
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Article number | 010 |
Pages (from-to) | 528-538 |
Number of pages | 11 |
Journal | Plasma Sources Science and Technology |
Volume | 3 |
Issue number | 4 |
DOIs | |
State | Published - 1 Dec 1994 |
ID: 52201175