A kinetic theory for the electron probe current is presented. The results allow us to infer the electron energy distribution function from the measured electron probe current and its derivatives over a wide range of pressures and magnetic fields. To recover the electron energy distribution function from probe characteristics two numerical methods are proposed. Probe measurements in a rare gas afterglow plasma were carried out over a wide pressure and energy range. The experimental results are in good agreement with the theory developed in the paper.

Original languageEnglish
Article number010
Pages (from-to)528-538
Number of pages11
JournalPlasma Sources Science and Technology
Volume3
Issue number4
DOIs
StatePublished - 1 Dec 1994

    Scopus subject areas

  • Condensed Matter Physics

ID: 52201175