Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
High Quality Graphene Grown by Sublimation on 4H-SiC (0001). / Lebedev, A. A.; Davydov, V. Yu; Usachov, D. Yu; Lebedev, S. P.; Smirnov, A. N.; Eliseyev, I. A.; Dunaevskiy, M. S.; Gushchina, E. V.; Bokai, K. A.; Pezoldt, J.
в: Semiconductors, Том 52, № 14, 01.12.2018, стр. 1882-1885.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - High Quality Graphene Grown by Sublimation on 4H-SiC (0001)
AU - Lebedev, A. A.
AU - Davydov, V. Yu
AU - Usachov, D. Yu
AU - Lebedev, S. P.
AU - Smirnov, A. N.
AU - Eliseyev, I. A.
AU - Dunaevskiy, M. S.
AU - Gushchina, E. V.
AU - Bokai, K. A.
AU - Pezoldt, J.
PY - 2018/12/1
Y1 - 2018/12/1
N2 - Abstract: The structural and electronic characteristics of epitaxial graphene films grown by thermal decomposition of the Si face of a semi-insulating 4H-SiC substrate in an argon environment have been studied by a large set of analytical techniques. It is shown that the results of a complex study make it possible to optimize the growth parameters and develop a reliable technology for the growth of high-quality single-layer graphene films. The charge-carrier concentration in the graphene layer was within 7 × 1011–1 × 1012 cm–2, and the maximum mobility of electrons at room temperature approached 6000 cm2/(V s).
AB - Abstract: The structural and electronic characteristics of epitaxial graphene films grown by thermal decomposition of the Si face of a semi-insulating 4H-SiC substrate in an argon environment have been studied by a large set of analytical techniques. It is shown that the results of a complex study make it possible to optimize the growth parameters and develop a reliable technology for the growth of high-quality single-layer graphene films. The charge-carrier concentration in the graphene layer was within 7 × 1011–1 × 1012 cm–2, and the maximum mobility of electrons at room temperature approached 6000 cm2/(V s).
UR - http://www.scopus.com/inward/record.url?scp=85059448321&partnerID=8YFLogxK
U2 - 10.1134/S1063782618140154
DO - 10.1134/S1063782618140154
M3 - Article
AN - SCOPUS:85059448321
VL - 52
SP - 1882
EP - 1885
JO - Semiconductors
JF - Semiconductors
SN - 1063-7826
IS - 14
ER -
ID: 38759219