DOI

In this paper we demonstrate a nanofabrication technique based on local ion irradiation of silicon dioxide with a focused helium ion beam. The wet etching of silicon dioxide irradiated with a focused helium ion beam is described in a two-dimensional case both numerically and experimentally. We suggest a model for the etching process based on the distribution of ion induced defects in the irradiated material. The profile of the surface of the etched silicon dioxide is simulated and compared with the results from scanning electron microscopy. Fabrication of a suspended nanostring with a diameter of less than 20 nm by means of etching ion-irradiated material is demonstrated.
Язык оригиналаанглийский
Номер статьи215301
Число страниц9
ЖурналNanotechnology
Том31
Номер выпуска21
Дата раннего онлайн-доступа24 янв 2020
DOI
СостояниеОпубликовано - 22 мая 2020

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