Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Electroluminescence of ion-implanted Si-SiO2 structures. / Baraban, A. P.; Konorov, P. P.; Malyavka, L. V.; Troshikhin, A. G.
в: Technical Physics, Том 45, № 8, 01.01.2000, стр. 1042-1044.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Electroluminescence of ion-implanted Si-SiO2 structures
AU - Baraban, A. P.
AU - Konorov, P. P.
AU - Malyavka, L. V.
AU - Troshikhin, A. G.
PY - 2000/1/1
Y1 - 2000/1/1
N2 - Specific features of the electroluminescence of ion-implanted (Ar ion implantation in oxide layer bulk) and ion-synthesized (SIMOX technology) Si-SiO2 structures were studied. The electroluminescence from the electrolyte-insulator-semiconductor system was registered in the 250-800 nm range at room temperature. It has been found that implantation increases the concentration of centers already present in the oxide layer bulk and creates new luminescent centers. The nature and the models of the centers are discussed.
AB - Specific features of the electroluminescence of ion-implanted (Ar ion implantation in oxide layer bulk) and ion-synthesized (SIMOX technology) Si-SiO2 structures were studied. The electroluminescence from the electrolyte-insulator-semiconductor system was registered in the 250-800 nm range at room temperature. It has been found that implantation increases the concentration of centers already present in the oxide layer bulk and creates new luminescent centers. The nature and the models of the centers are discussed.
UR - http://www.scopus.com/inward/record.url?scp=0034338683&partnerID=8YFLogxK
U2 - 10.1134/1.1307014
DO - 10.1134/1.1307014
M3 - Article
AN - SCOPUS:0034338683
VL - 45
SP - 1042
EP - 1044
JO - Technical Physics
JF - Technical Physics
SN - 1063-7842
IS - 8
ER -
ID: 47620347