Результаты исследований: Научные публикации в периодических изданиях › статья в журнале по материалам конференции › Рецензирование
Effect of oxygen presence in sputtering chamber on magnetization of thin FeCo films. / Pusenkov, V. M.; Moskalev, K.; Pleshanov, N.; Schebetov, A.; Syromyatnikov, V.; Ul'Yanov, V.; Kobzev, A.; Nikonov, O.
в: Physica B: Condensed Matter, Том 276-278, 03.2000, стр. 654-655.Результаты исследований: Научные публикации в периодических изданиях › статья в журнале по материалам конференции › Рецензирование
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TY - JOUR
T1 - Effect of oxygen presence in sputtering chamber on magnetization of thin FeCo films
AU - Pusenkov, V. M.
AU - Moskalev, K.
AU - Pleshanov, N.
AU - Schebetov, A.
AU - Syromyatnikov, V.
AU - Ul'Yanov, V.
AU - Kobzev, A.
AU - Nikonov, O.
PY - 2000/3
Y1 - 2000/3
N2 - The effect of oxygen presence in sputtering chamber on magnetization of thin (approximately 700-800 angstroms) FeCo films was studied by polarized neutron reflectometry. The samples were prepared by magnetron sputtering of the Fe36Co64 alloy onto glass substrates in the presence of oxygen in the sputtering chamber. For a given oxygen content in the sputtering chamber the oxygen concentration in the film decreased with the sputtering rate. The increase in oxygen inside the film was found to decrease its magnetic saturation induction. The exact element depth profiles of the prepared samples was made by Rutherford back scattering (RBS) technique.
AB - The effect of oxygen presence in sputtering chamber on magnetization of thin (approximately 700-800 angstroms) FeCo films was studied by polarized neutron reflectometry. The samples were prepared by magnetron sputtering of the Fe36Co64 alloy onto glass substrates in the presence of oxygen in the sputtering chamber. For a given oxygen content in the sputtering chamber the oxygen concentration in the film decreased with the sputtering rate. The increase in oxygen inside the film was found to decrease its magnetic saturation induction. The exact element depth profiles of the prepared samples was made by Rutherford back scattering (RBS) technique.
UR - http://www.scopus.com/inward/record.url?scp=0033893229&partnerID=8YFLogxK
U2 - 10.1016/S0921-4526(99)01744-5
DO - 10.1016/S0921-4526(99)01744-5
M3 - Conference article
AN - SCOPUS:0033893229
VL - 276-278
SP - 654
EP - 655
JO - Physica B: Condensed Matter
JF - Physica B: Condensed Matter
SN - 0921-4526
T2 - 2nd European Conference on Neutron Scattering (ECNS '99)
Y2 - 1 September 1999 through 4 September 1999
ER -
ID: 86507391