Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Dislocation luminescence and electrical properties of dislocation network produced by silicon direct wafer bonding. / Bondarenko, Anton; Vyvenko, Oleg; Bazlov, Nikolay; Kononchuk, Oleg.
в: Physica B: Condensed Matter, Том 404, № 23-24, 15.12.2009, стр. 4608-4611.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Dislocation luminescence and electrical properties of dislocation network produced by silicon direct wafer bonding
AU - Bondarenko, Anton
AU - Vyvenko, Oleg
AU - Bazlov, Nikolay
AU - Kononchuk, Oleg
PY - 2009/12/15
Y1 - 2009/12/15
N2 - Cathodoluminescent (CL) and electrical properties of the dislocation network (DN) produced by direct silicon wafer bonding were investigated. A strong impact of the electric field on the spectrum shape and the intensity of dislocation related CL of the DN built into space charge region (SCR) of Schottky-diode was found. Correlations between the characteristic features of the dependences of CL, dark current, electron beam induced current (EBIC) and capacitance on the applied bias were established. The energy diagram explaining obtained results is proposed.
AB - Cathodoluminescent (CL) and electrical properties of the dislocation network (DN) produced by direct silicon wafer bonding were investigated. A strong impact of the electric field on the spectrum shape and the intensity of dislocation related CL of the DN built into space charge region (SCR) of Schottky-diode was found. Correlations between the characteristic features of the dependences of CL, dark current, electron beam induced current (EBIC) and capacitance on the applied bias were established. The energy diagram explaining obtained results is proposed.
KW - Cathodoluminescence
KW - Dislocation luminescence
KW - Dislocation networks
UR - http://www.scopus.com/inward/record.url?scp=74349100864&partnerID=8YFLogxK
U2 - 10.1016/j.physb.2009.08.143
DO - 10.1016/j.physb.2009.08.143
M3 - Article
AN - SCOPUS:74349100864
VL - 404
SP - 4608
EP - 4611
JO - Physica B: Condensed Matter
JF - Physica B: Condensed Matter
SN - 0921-4526
IS - 23-24
ER -
ID: 51104948