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X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures. / Filatova, E.O.; Kozhevnikov, I.V.; Sokolov, A.A.; Yegorova, Y.V.; Konashuk, A.S.; Vilkov, O.Y.; Schaefers, F.; Gorgoi, M.; Shulakov, A.S.

In: Microelectronic Engineering, Vol. 109, 2013, p. 13-16.

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Filatova, E.O. ; Kozhevnikov, I.V. ; Sokolov, A.A. ; Yegorova, Y.V. ; Konashuk, A.S. ; Vilkov, O.Y. ; Schaefers, F. ; Gorgoi, M. ; Shulakov, A.S. / X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures. In: Microelectronic Engineering. 2013 ; Vol. 109. pp. 13-16.

BibTeX

@article{9ff2d6d0e02347f5bc6fd501fd59ea8c,
title = "X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures",
author = "E.O. Filatova and I.V. Kozhevnikov and A.A. Sokolov and Y.V. Yegorova and A.S. Konashuk and O.Y. Vilkov and F. Schaefers and M. Gorgoi and A.S. Shulakov",
year = "2013",
doi = "10.1016/j.mee.2013.03.095",
language = "English",
volume = "109",
pages = "13--16",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures

AU - Filatova, E.O.

AU - Kozhevnikov, I.V.

AU - Sokolov, A.A.

AU - Yegorova, Y.V.

AU - Konashuk, A.S.

AU - Vilkov, O.Y.

AU - Schaefers, F.

AU - Gorgoi, M.

AU - Shulakov, A.S.

PY - 2013

Y1 - 2013

U2 - 10.1016/j.mee.2013.03.095

DO - 10.1016/j.mee.2013.03.095

M3 - Article

VL - 109

SP - 13

EP - 16

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -

ID: 7370680