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X-ray and photoelectron spectroscopic nondestructive methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures
Research output
:
Contribution to journal
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Article
Department of Solid State Electronics
Overview
Cite this
Links
http://dx.doi.org/10.1016/j.mee.2013.03.095
DOI
https://doi.org/10.1016/j.mee.2013.03.095
Other version
E.O. Filatova
I.V. Kozhevnikov
A.A. Sokolov
Y.V. Yegorova
A.S. Konashuk
O.Y. Vilkov
F. Schaefers
M. Gorgoi
A.S. Shulakov
Original language
English
Pages (from-to)
13-16
Journal
Microelectronic Engineering
Volume
109
DOIs
https://doi.org/10.1016/j.mee.2013.03.095
State
Published -
2013
ID: 7370680