Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research
| Original language | Undefined |
|---|---|
| Title of host publication | 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 68-70 |
| ISBN (Print) | 978-1-5090-3416-1 |
| DOIs | |
| State | Published - 2017 |
| Event | 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 - St. Petersburg, Russian Federation Duration: 1 Oct 2016 → 3 Oct 2016 |
| Conference | 14th International Baltic Conference on Atomic Layer Deposition, BALD 2016 |
|---|---|
| Country/Territory | Russian Federation |
| City | St. Petersburg |
| Period | 1/10/16 → 3/10/16 |
ID: 7656700