Technology of the Atomic Layer Deposition for modification Microchannel Plates with High Aspect Ratio. › SPbU Researchers Portal

Technology of the Atomic Layer Deposition for modification Microchannel Plates with High Aspect Ratio.

Research output: Contribution to journal › Article › peer-review

Department of Solid State Electronics

DOI

https://doi.org/10.1134/S2635167623600682
Final published version

Original language	English
Pages (from-to)	S179–S185
Number of pages	7
Journal	Nanobiotechnology Reports
Volume	18
Issue number	Suppl 1
DOIs	https://doi.org/10.1134/S2635167623600682
State	Published - Dec 2023

ID: 118281207