Successive ionic layer deposition: Possibilities for gas sensor applications

Research output: Contribution to journal › Article › peer-review

Original language	Undefined
Pages (from-to)	45-50
Journal	Journal of Physics: Conference Series
Volume	15
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/15/1/008
State	Published - 2005
Externally published	Yes

ID: 5111000