DOI

  • Gennady Gorokh
  • Natalia Bogomazova
  • Abdelhafed Taleb
  • Valery Zhylinski
  • Timur Galkovsky
  • Anna Zakhlebayeva
  • Andrei Lozovenko
  • Michael Iji
  • Vladimir Fedosenko
  • Valeri Tolstoy
The process of layer-by-layer ionic deposition of tin-tungsten oxide films on smooth silicon substrates and nanoporous anodic alumina matrices has been studied. To achieve the film deposition, solutions containing cationic SnF2 or SnCl2 and anionic Na2WO4 or (NH4)2O·WO3 precursors have been used. The effect of the solution compositions on the films deposition rates, morphology, composition, and properties was investigated. Possible mechanisms of tin-tungsten oxide films deposition into the pores and on the surface of anodic alumina are discussed. The electro-physical and gas-sensitive properties of nanostructured SnxWyOz films have been investigated. The prepared nanocomposites exhibit stable semiconductor properties characterized by high resistance and low temperature coefficient of electrical resistance of about 1.6 × 10−3 K−1. The sensitivity of the SnxWyOz films to 2 and 10 ppm concentrations of ammonia at 523 K was 0.35 and 1.17, respectively. At concentrations of 1 and 2 ppm of nitrogen dioxide, the sensitivity was 0.48 and 1.4, respectively, at a temperature of 473 K. At the temperature of 573 K, the sensitivity of 1.3 was obtained for 100 ppm of ethanol. The prepared nanostructured tin-tungsten oxide films showed promising gas-sensitivity, which makes them a good candidate for the manufacturing of gas sensors with high sensitivity and low power consumption.
Translated title of the contributionПространственно-упорядоченные наноструктурированные композиты оксидов олова и вольфрама полученные методом ионного наслаивания и их применения для создания газовых сенсоровгазовых
Original languageEnglish
Article number4169
Number of pages14
JournalSensors (Switzerland)
Volume21
Issue number12
DOIs
StatePublished - 2 Jun 2021

    Scopus subject areas

  • Materials Science(all)
  • Analytical Chemistry
  • Information Systems
  • Instrumentation
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering
  • Biochemistry

    Research areas

  • Gas sensor, Ionic layer deposition, Nanoporous anodic alumina matrixes, Tin-tungsten oxides, ionic layer deposition, nanoporous anodic alumina matrixes, SIZE, tin-tungsten oxides, gas sensor, ALUMINA FILMS, MICROSTRUCTURE

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