Soft X-Ray Reflectometry, Hard X-Ray Photoelectron Spectroscopy, and HRTEM investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	015001_1-12
Journal	Science and Technology of Advanced Materials
Volume	13
Issue number	1
DOIs	https://doi.org/doi:10.1088/1468-6996/13/1/015001
State	Published - 2012

ID: 5193817