• N.K. Maksimova
  • E.Y. Sevastyanov
  • E.V. Chernikov
  • P.M. Korusenko
  • Sergey N. Nesov
  • S.V. Kim
  • A.A. Biryukov
  • N.V. Sergeychenko
  • N.A. Davletkildeev
  • D.V. Sokolov
In this work, novel semiconductor sensors were developed for detecting high pre-explosive concentrations of H2 (0.1–2.5 vol%) with high selectivity and stability. The sensors were based on thin (∼100 nm) nanocrystalline SnO2 films produced by magnetron sputtering of dispersed Pt and Pd layers deposited on the surface and addition of 13–14 at% Pt in the bulk. Studies on their nanostructure, composition, electrical properties, and gas-sensitive characteristics were carried out. X-ray photoelectron and Raman spectroscopies revealed that in the process of stabilizing annealing in Pt/Pd/SnO2:Sb,Pt film platinum introduced into the bulk segregates on the surface of the SnO2 microcrystals in the form of Pt° metal clusters and dispersed Pt2+ ions. The dispersed Pt2+ ions form bonds with lattice oxygen and contribute to the overlap of conduction channels. In the sensor subjected to annealing at =723 K and =873K, the optimal situation is realized when under the action of low (n < 0.1 vol%) H2 concentrations, the condition 2d0 = dM is satisfied and G1/G0 = 9–12. In the range of 0.1–2.5 vol% H2, narrowing of the space-charge region favors the formation of a conducting layer, and at 2d0 ≤ dM there is a sharp increase in the values of the responses to G1/G0 = 220–250 at 2.5 vol%.
Original languageEnglish
Article number130020
Number of pages11
JournalSensors and Actuators, B: Chemical
Volume341
Early online date22 Apr 2021
DOIs
StatePublished - 15 Aug 2021

    Research areas

  • thin films, tin dioxide (SnO), hydrogen sensors, platinum, stability of sensor parameters, Raman spectroscopy, X-ray photoelectron spectroscopy, Thin films, Platinum, Stability of sensor parameters, Hydrogen sensors, Tin dioxide (SnO ), STABILITY, ACETONE, SENSITIVITY, COMPOSITES, CO, NANOPARTICLES, Tin dioxide (SnO2), NANOCRYSTALLINE SNO2, GAS, IMPROVEMENT, SURFACE

    Scopus subject areas

  • Physics and Astronomy(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Metals and Alloys
  • Instrumentation
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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