Research output: Contribution to journal › Article › peer-review
Scaling laws enable one to simply estimate and predict plasma characteristics based of external discharge parameters. The presence of negative ions drastically changes the transport processes that define the spatial distributions of plasma components and other properties of the plasma. Thus, the scaling laws can be derived using a global model of a plasma reactor that assumes certain spatial distributions of charged species.
Original language | English |
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Article number | 106 |
Number of pages | 1 |
Journal | IEEE International Conference on Plasma Science |
DOIs | |
State | Published - 1 Jan 2002 |
ID: 42902889