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Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition. / Zemtsova, E.G.; Arbenin, A.Y.; Plotnikov, A.F.; Smirnov, V.M.

In: Journal of Vacuum Science and Technology A, Vol. 33, No. 021519, 2015.

Research output: Contribution to journal › Article

Harvard

Zemtsova, EG, Arbenin, AY, Plotnikov, AF & Smirnov, VM 2015, 'Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition', Journal of Vacuum Science and Technology A, vol. 33, no. 021519. https://doi.org/10.1116/1.4907989

APA

Zemtsova, E. G., Arbenin, A. Y., Plotnikov, A. F., & Smirnov, V. M. (2015). Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition. Journal of Vacuum Science and Technology A, 33(021519). https://doi.org/10.1116/1.4907989

Vancouver

Zemtsova EG, Arbenin AY, Plotnikov AF, Smirnov VM. Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition. Journal of Vacuum Science and Technology A. 2015;33(021519). https://doi.org/10.1116/1.4907989

Author

Zemtsova, E.G. ; Arbenin, A.Y. ; Plotnikov, A.F. ; Smirnov, V.M. / Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition. In: Journal of Vacuum Science and Technology A. 2015 ; Vol. 33, No. 021519.

BibTeX

@article{18ac236c130e4f59a52f603a4785bf18,
title = "Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition",
author = "E.G. Zemtsova and A.Y. Arbenin and A.F. Plotnikov and V.M. Smirnov",
year = "2015",
doi = "10.1116/1.4907989",
language = "English",
volume = "33",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "021519",

}

RIS

TY - JOUR

T1 - Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition

AU - Zemtsova, E.G.

AU - Arbenin, A.Y.

AU - Plotnikov, A.F.

AU - Smirnov, V.M.

PY - 2015

Y1 - 2015

U2 - 10.1116/1.4907989

DO - 10.1116/1.4907989

M3 - Article

VL - 33

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

SN - 0734-2101

IS - 021519

ER -

ID: 3934553