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Pore radius fine tuning of a silica matrix (MCM-41) based on the synthesis of alumina nanolayers with different thicknesses by atomic layer deposition
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Article
Department of Solid State Chemistry
Overview
Cite this
Links
http://dx.doi.org/10.1116/1.4907989
DOI
https://doi.org/10.1116/1.4907989
Other version
E.G. Zemtsova
A.Y. Arbenin
A.F. Plotnikov
V.M. Smirnov
Original language
English
Journal
Journal of Vacuum Science and Technology A
Volume
33
Issue number
021519
DOIs
https://doi.org/10.1116/1.4907989
State
Published -
2015
ID: 3934553