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Photoluminescence of Ta2O5 Films Formed by the Molecular Layer Deposition Method

Research output: Contribution to journal › Article

DOI

https://doi.org/10.1134/S1063785016040040
Other version

Original language	Undefined
Pages (from-to)	341-343
Journal	Technical Physics Letters
Volume	42
Issue number	4
DOIs	https://doi.org/10.1134/S1063785016040040
State	Published - 2016
Externally published	Yes

ID: 7564957