Abstract: A self-consistent model of inductively coupled plasma (ICP) discharge in argon describing the main plasma parameters at medium and high pressures was formulated in the work. Numerical calculations were carried out in a wide range of discharge conditions. Deviations from the fulfillment of similarity laws for some parameters for geometrically similar discharge tubes are shown.
Original languageEnglish
Pages (from-to)S232-S239
JournalHigh Energy Chemistry
Volume58
Issue numberSuppl 2
DOIs
StatePublished - 23 Nov 2024

ID: 127646789