Optical system for measuring the relative position of two planes

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	676-680
Journal	Journal of Optical Technology (A Translation of Opticheskii Zhurnal)
Volume	81
Issue number	11
DOIs	https://doi.org/10.1364/JOT.81.000676
State	Published - 2014

ID: 5795268