LASER INTERFEROMETRIC DIFFRACTOMETRY FOR MEASUREMENTS OF DIFFRACTION GRATING SPACING. / Korotkov, V.I.; Pulkin, S.A.; Vitushkin, A.L.
In: Applied Optics, Vol. 35, No. 24, 1996, p. 4782-4786.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - LASER INTERFEROMETRIC DIFFRACTOMETRY FOR MEASUREMENTS OF DIFFRACTION GRATING SPACING
AU - Korotkov, V.I.
AU - Pulkin, S.A.
AU - Vitushkin, A.L.
PY - 1996
Y1 - 1996
M3 - Article
VL - 35
SP - 4782
EP - 4786
JO - Applied Optics
JF - Applied Optics
SN - 1559-128X
IS - 24
ER -
ID: 5566501