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LASER INTERFEROMETRIC DIFFRACTOMETRY FOR MEASUREMENTS OF DIFFRACTION GRATING SPACING

Research output: Contribution to journal › Article

V.I. Korotkov
S.A. Pulkin
A.L. Vitushkin

Original language	English
Pages (from-to)	4782-4786
Journal	Applied Optics
Volume	35
Issue number	24
State	Published - 1996
Externally published	Yes

ID: 5566501