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Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics. / Grigoryev, L. V.; Morozov, I. S.; Zhuravlev, N. V.; Nefedov, V. G.; Shakin, O. V.

In: Journal of Physics: Conference Series, Vol. 1281, No. 1, 012025, 12.08.2019.

Research output: Contribution to journal › Conference article › peer-review

Harvard

Grigoryev, LV, Morozov, IS, Zhuravlev, NV, Nefedov, VG & Shakin, OV 2019, 'Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics', Journal of Physics: Conference Series, vol. 1281, no. 1, 012025. https://doi.org/10.1088/1742-6596/1281/1/012025

APA

Grigoryev, L. V., Morozov, I. S., Zhuravlev, N. V., Nefedov, V. G., & Shakin, O. V. (2019). Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics. Journal of Physics: Conference Series, 1281(1), [012025]. https://doi.org/10.1088/1742-6596/1281/1/012025

Vancouver

Grigoryev LV, Morozov IS, Zhuravlev NV, Nefedov VG, Shakin OV. Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics. Journal of Physics: Conference Series. 2019 Aug 12;1281(1). 012025. https://doi.org/10.1088/1742-6596/1281/1/012025

Author

Grigoryev, L. V. ; Morozov, I. S. ; Zhuravlev, N. V. ; Nefedov, V. G. ; Shakin, O. V. / Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics. In: Journal of Physics: Conference Series. 2019 ; Vol. 1281, No. 1.

BibTeX

@article{face88ee70e7438eb50a2251298e5c5e,
title = "Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics",
abstract = "The results of the study of thin nanostructured ZnO films obtained by the method of reactive ion-plasma sputtering are presented. The influence of technological factors on the structural and optical properties of films is considered.",
author = "Grigoryev, {L. V.} and Morozov, {I. S.} and Zhuravlev, {N. V.} and Nefedov, {V. G.} and Shakin, {O. V.}",
note = "Publisher Copyright: {\textcopyright} Published under licence by IOP Publishing Ltd.; 14th International Conference on Films and Coatings, ICFC 2019 ; Conference date: 14-05-2019 Through 16-05-2019",
year = "2019",
month = aug,
day = "12",
doi = "10.1088/1742-6596/1281/1/012025",
language = "English",
volume = "1281",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",

}

RIS

TY - JOUR

T1 - Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics

AU - Grigoryev, L. V.

AU - Morozov, I. S.

AU - Zhuravlev, N. V.

AU - Nefedov, V. G.

AU - Shakin, O. V.

N1 - Publisher Copyright: © Published under licence by IOP Publishing Ltd.

PY - 2019/8/12

Y1 - 2019/8/12

N2 - The results of the study of thin nanostructured ZnO films obtained by the method of reactive ion-plasma sputtering are presented. The influence of technological factors on the structural and optical properties of films is considered.

AB - The results of the study of thin nanostructured ZnO films obtained by the method of reactive ion-plasma sputtering are presented. The influence of technological factors on the structural and optical properties of films is considered.

UR - http://www.scopus.com/inward/record.url?scp=85072172848&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1281/1/012025

DO - 10.1088/1742-6596/1281/1/012025

M3 - Conference article

AN - SCOPUS:85072172848

VL - 1281

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012025

T2 - 14th International Conference on Films and Coatings, ICFC 2019

Y2 - 14 May 2019 through 16 May 2019

ER -

ID: 86115190