Ion velocity distribution functions in argon and helium discharges : detailed comparison of numerical simulation results and experimental data. / Wang, Huihui; Sukhomlinov, Vladimir S.; Kaganovich, Igor D.; Mustafaev, Alexander S.
In: Plasma Sources Science and Technology, Vol. 26, No. 2, 024002, 2017, p. 1 - 7.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Ion velocity distribution functions in argon and helium discharges
T2 - detailed comparison of numerical simulation results and experimental data
AU - Wang, Huihui
AU - Sukhomlinov, Vladimir S.
AU - Kaganovich, Igor D.
AU - Mustafaev, Alexander S.
PY - 2017
Y1 - 2017
N2 - Using the Monte Carlo collision method, we have performed simulations of ion velocity distribution functions (IVDF) taking into account both elastic collisions and charge exchange collisions of ions with atoms in uniform electric fields for argon and helium background gases. The simulation results are verified by comparison with the experiment data of the ion mobilities and the ion transverse diffusion coefficients in argon and helium. The recently published experimental data for the first seven coefficients of the Legendre polynomial expansion of the ion energy and angular distribution functions are used to validate simulation results for IVDF. Good agreement between measured and simulated IVDFs shows that the developed simulation model can be used for accurate calculations of IVDFs.
AB - Using the Monte Carlo collision method, we have performed simulations of ion velocity distribution functions (IVDF) taking into account both elastic collisions and charge exchange collisions of ions with atoms in uniform electric fields for argon and helium background gases. The simulation results are verified by comparison with the experiment data of the ion mobilities and the ion transverse diffusion coefficients in argon and helium. The recently published experimental data for the first seven coefficients of the Legendre polynomial expansion of the ion energy and angular distribution functions are used to validate simulation results for IVDF. Good agreement between measured and simulated IVDFs shows that the developed simulation model can be used for accurate calculations of IVDFs.
KW - ion velocity distribution function
KW - ion-atom angular differential cross section
KW - Monte Carlo collision method
KW - CROSS-SECTIONS
KW - CHARGE-EXCHANGE
KW - PLASMA
KW - SCATTERING
KW - ELECTRONS
KW - HE+
U2 - 10.1088/1361-6595/26/2/024002
DO - 10.1088/1361-6595/26/2/024002
M3 - Article
VL - 26
SP - 1
EP - 7
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
SN - 0963-0252
IS - 2
M1 - 024002
ER -
ID: 7737383