Interface properties of Si-SiO2-Ta2O5 structure by cathodoluminescence spectroscopy. / Baraban, A. P.; Dmitriev, V. A.; Drozd, V. E.; Prokofiev, V. A.; Samarin, S. N.; Filatova, E. O.
In: Journal of Applied Physics, Vol. 119, 2016, p. 055307-5.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Interface properties of Si-SiO2-Ta2O5 structure by cathodoluminescence spectroscopy
AU - Baraban, A. P.
AU - Dmitriev, V. A.
AU - Drozd, V. E.
AU - Prokofiev, V. A.
AU - Samarin, S. N.
AU - Filatova, E. O.
PY - 2016
Y1 - 2016
M3 - Article
VL - 119
SP - 55307
EP - 55305
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
ER -
ID: 7553327