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Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds. / Филатова, Елена Олеговна; Сахоненков, Сергей Сергеевич; Гайсин, Айдар Уралович; Конашук, Алексей Сергеевич.

In: Physical Chemistry Chemical Physics, 2020.

Research output: Contribution to journal › Article › peer-review

Harvard

Филатова, ЕО, Сахоненков, СС, Гайсин, АУ & Конашук, АС 2020, 'Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds', Physical Chemistry Chemical Physics. https://doi.org/10.1039/D0CP05180B

APA

Филатова, Е. О., Сахоненков, С. С., Гайсин, А. У., & Конашук, А. С. (2020). Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds. Physical Chemistry Chemical Physics. https://doi.org/10.1039/D0CP05180B

Vancouver

Филатова ЕО, Сахоненков СС, Гайсин АУ, Конашук АС. Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds. Physical Chemistry Chemical Physics. 2020. https://doi.org/10.1039/D0CP05180B

Author

Филатова, Елена Олеговна ; Сахоненков, Сергей Сергеевич ; Гайсин, Айдар Уралович ; Конашук, Алексей Сергеевич. / Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds. In: Physical Chemistry Chemical Physics. 2020.

BibTeX

@article{1404bea422194d85a201aef0f79508a4,
title = "Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds",
author = "Филатова, {Елена Олеговна} and Сахоненков, {Сергей Сергеевич} and Гайсин, {Айдар Уралович} and Конашук, {Алексей Сергеевич}",
year = "2020",
doi = "10.1039/D0CP05180B",
language = "English",
journal = "Physical Chemistry Chemical Physics",
issn = "1463-9076",
publisher = "Royal Society of Chemistry",

}

RIS

TY - JOUR

T1 - Inhibition of chemical interaction of molybdenum and silicon in Mo/Si multilayer structure by formation of intermediate compounds

AU - Филатова, Елена Олеговна

AU - Сахоненков, Сергей Сергеевич

AU - Гайсин, Айдар Уралович

AU - Конашук, Алексей Сергеевич

PY - 2020

Y1 - 2020

U2 - 10.1039/D0CP05180B

DO - 10.1039/D0CP05180B

M3 - Article

JO - Physical Chemistry Chemical Physics

JF - Physical Chemistry Chemical Physics

SN - 1463-9076

ER -

ID: 71886225