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Influence of Annealing Conditions and HfO2 Impurity Material on Nitrogen and Oxygen Diffusion at the HfO2 / TiN Interface. / Бугаев, Александр Викторович; Конашук, Алексей Сергеевич; Филатова, Елена Олеговна.

2021. 120 Abstract from International Student Conference Science and Progress 2021, Санкт-Петербург, Russian Federation.

Research output: Contribution to conference › Abstract › peer-review

Harvard

Бугаев, АВ, Конашук, АС & Филатова, ЕО 2021, 'Influence of Annealing Conditions and HfO2 Impurity Material on Nitrogen and Oxygen Diffusion at the HfO2 / TiN Interface', International Student Conference Science and Progress 2021, Санкт-Петербург, Russian Federation, 9/11/21 - 11/11/21 pp. 120.

APA

Бугаев, А. В., Конашук, А. С., & Филатова, Е. О. (2021). Influence of Annealing Conditions and HfO2 Impurity Material on Nitrogen and Oxygen Diffusion at the HfO2 / TiN Interface. 120. Abstract from International Student Conference Science and Progress 2021, Санкт-Петербург, Russian Federation.

Vancouver

Бугаев АВ, Конашук АС, Филатова ЕО. Influence of Annealing Conditions and HfO2 Impurity Material on Nitrogen and Oxygen Diffusion at the HfO2 / TiN Interface. 2021. Abstract from International Student Conference Science and Progress 2021, Санкт-Петербург, Russian Federation.

Author

Бугаев, Александр Викторович ; Конашук, Алексей Сергеевич ; Филатова, Елена Олеговна. / Influence of Annealing Conditions and HfO2 Impurity Material on Nitrogen and Oxygen Diffusion at the HfO2 / TiN Interface. Abstract from International Student Conference Science and Progress 2021, Санкт-Петербург, Russian Federation.1 p.

BibTeX

@conference{c53924c58dca4948b7126753a4e15cc2,
title = "Influence of Annealing Conditions and HfO2 Impurity Material on Nitrogen and Oxygen Diffusion at the HfO2 / TiN Interface",
author = "Бугаев, {Александр Викторович} and Конашук, {Алексей Сергеевич} and Филатова, {Елена Олеговна}",
year = "2021",
month = nov,
language = "English",
pages = "120",
note = "International Student Conference Science and Progress 2021 ; Conference date: 09-11-2021 Through 11-11-2021",
url = "https://events.spbu.ru/events/sp-2021?lang=Eng, https://events.spbu.ru/events/sp-2021",

}

RIS

TY - CONF

T1 - Influence of Annealing Conditions and HfO2 Impurity Material on Nitrogen and Oxygen Diffusion at the HfO2 / TiN Interface

AU - Бугаев, Александр Викторович

AU - Конашук, Алексей Сергеевич

AU - Филатова, Елена Олеговна

PY - 2021/11

Y1 - 2021/11

UR - https://events.spbu.ru/eventsContent/events/2021/Book2021.pdf

M3 - Abstract

SP - 120

T2 - International Student Conference Science and Progress 2021

Y2 - 9 November 2021 through 11 November 2021

ER -

ID: 89759688