Standard

Hunting for a single-source precursor : Toward stoichiometry controlled CVD of 13-15 composites. / Timoshkin, A. Y.

In: Solid-State Electronics, Vol. 47, No. 3, 01.03.2003, p. 543-548.

Research output: Contribution to journal › Article › peer-review

Harvard

Timoshkin, AY 2003, 'Hunting for a single-source precursor: Toward stoichiometry controlled CVD of 13-15 composites', Solid-State Electronics, vol. 47, no. 3, pp. 543-548. https://doi.org/10.1016/S0038-1101(02)00410-0

APA

Timoshkin, A. Y. (2003). Hunting for a single-source precursor: Toward stoichiometry controlled CVD of 13-15 composites. Solid-State Electronics, 47(3), 543-548. https://doi.org/10.1016/S0038-1101(02)00410-0

Vancouver

Timoshkin AY. Hunting for a single-source precursor: Toward stoichiometry controlled CVD of 13-15 composites. Solid-State Electronics. 2003 Mar 1;47(3):543-548. https://doi.org/10.1016/S0038-1101(02)00410-0

Author

Timoshkin, A. Y. / Hunting for a single-source precursor : Toward stoichiometry controlled CVD of 13-15 composites. In: Solid-State Electronics. 2003 ; Vol. 47, No. 3. pp. 543-548.

BibTeX

@article{e5220cbc36f1430a94abccad573ef6f5,
title = "Hunting for a single-source precursor: Toward stoichiometry controlled CVD of 13-15 composites",
abstract = "In the present report mixed cubic clusters [(HAl)x(HGa)y(HIn)z(YH)4] (Y=N, P, As, x+y+z=4) and [(HM)4(NH)k(PH)1(AsH)m] (M=Al, Ga, In, k+l+m=4) are theoretically investigated for the first time. Structural parameters, vibrational frequencies and thermodynamic properties have been obtained at B3LYP/LANL2DZ(d,p) level of theory. At high temperatures, mixed clusters are predicted to be thermodynamically more stable compared to mixture of homoatomic cubanes. Nitrogen-containing clusters have higher stability toward dissociation and are formed more exothermically compared to P, As analogs. Thus, mixed nitrogen clusters are expected to serve as advanced single-source precursors for CVD of mixed alloys, such as AlxGayIn1-x-yN. Variation of the Al:Ga:In ratio is possible by using higher oligomers [HMYH]n (n=6-12).",
keywords = "13-15 composites, Chemical vapor deposition, Inorganic rings and clusters, Modeling, Quantum chemistry, Single-source precursors",
author = "Timoshkin, {A. Y.}",
year = "2003",
month = mar,
day = "1",
doi = "10.1016/S0038-1101(02)00410-0",
language = "English",
volume = "47",
pages = "543--548",
journal = "Solid-State Electronics",
issn = "0038-1101",
publisher = "Elsevier",
number = "3",

}

RIS

TY - JOUR

T1 - Hunting for a single-source precursor

T2 - Toward stoichiometry controlled CVD of 13-15 composites

AU - Timoshkin, A. Y.

PY - 2003/3/1

Y1 - 2003/3/1

N2 - In the present report mixed cubic clusters [(HAl)x(HGa)y(HIn)z(YH)4] (Y=N, P, As, x+y+z=4) and [(HM)4(NH)k(PH)1(AsH)m] (M=Al, Ga, In, k+l+m=4) are theoretically investigated for the first time. Structural parameters, vibrational frequencies and thermodynamic properties have been obtained at B3LYP/LANL2DZ(d,p) level of theory. At high temperatures, mixed clusters are predicted to be thermodynamically more stable compared to mixture of homoatomic cubanes. Nitrogen-containing clusters have higher stability toward dissociation and are formed more exothermically compared to P, As analogs. Thus, mixed nitrogen clusters are expected to serve as advanced single-source precursors for CVD of mixed alloys, such as AlxGayIn1-x-yN. Variation of the Al:Ga:In ratio is possible by using higher oligomers [HMYH]n (n=6-12).

AB - In the present report mixed cubic clusters [(HAl)x(HGa)y(HIn)z(YH)4] (Y=N, P, As, x+y+z=4) and [(HM)4(NH)k(PH)1(AsH)m] (M=Al, Ga, In, k+l+m=4) are theoretically investigated for the first time. Structural parameters, vibrational frequencies and thermodynamic properties have been obtained at B3LYP/LANL2DZ(d,p) level of theory. At high temperatures, mixed clusters are predicted to be thermodynamically more stable compared to mixture of homoatomic cubanes. Nitrogen-containing clusters have higher stability toward dissociation and are formed more exothermically compared to P, As analogs. Thus, mixed nitrogen clusters are expected to serve as advanced single-source precursors for CVD of mixed alloys, such as AlxGayIn1-x-yN. Variation of the Al:Ga:In ratio is possible by using higher oligomers [HMYH]n (n=6-12).

KW - 13-15 composites

KW - Chemical vapor deposition

KW - Inorganic rings and clusters

KW - Modeling

KW - Quantum chemistry

KW - Single-source precursors

UR - http://www.scopus.com/inward/record.url?scp=0037350118&partnerID=8YFLogxK

U2 - 10.1016/S0038-1101(02)00410-0

DO - 10.1016/S0038-1101(02)00410-0

M3 - Article

AN - SCOPUS:0037350118

VL - 47

SP - 543

EP - 548

JO - Solid-State Electronics

JF - Solid-State Electronics

SN - 0038-1101

IS - 3

ER -

ID: 36024312