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Helium ion irradiation for the fabrication of nanostructures by means of wet etching. / Petrov, Yu.V.; Grigoryev, E.A.; Sharov, T.V.; Baraban, A.P.

2019. 105-107 Abstract from ВЗАИМОДЕЙСТВИЕ ИОНОВ С ПОВЕРХНОСТЬЮ ВИП-2019, Москва, Russian Federation.

Research output: Contribution to conference › Abstract › peer-review

Harvard

Petrov, YV, Grigoryev, EA, Sharov, TV & Baraban, AP 2019, 'Helium ion irradiation for the fabrication of nanostructures by means of wet etching.', ВЗАИМОДЕЙСТВИЕ ИОНОВ С ПОВЕРХНОСТЬЮ ВИП-2019, Москва, Russian Federation, 19/08/19 - 23/08/19 pp. 105-107. <http://elibrary.ru/item.asp?id=41272318>

APA

Petrov, Y. V., Grigoryev, E. A., Sharov, T. V., & Baraban, A. P. (2019). Helium ion irradiation for the fabrication of nanostructures by means of wet etching.. 105-107. Abstract from ВЗАИМОДЕЙСТВИЕ ИОНОВ С ПОВЕРХНОСТЬЮ ВИП-2019, Москва, Russian Federation. http://elibrary.ru/item.asp?id=41272318

Vancouver

Petrov YV, Grigoryev EA, Sharov TV, Baraban AP. Helium ion irradiation for the fabrication of nanostructures by means of wet etching.. 2019. Abstract from ВЗАИМОДЕЙСТВИЕ ИОНОВ С ПОВЕРХНОСТЬЮ ВИП-2019, Москва, Russian Federation.

Author

Petrov, Yu.V. ; Grigoryev, E.A. ; Sharov, T.V. ; Baraban, A.P. / Helium ion irradiation for the fabrication of nanostructures by means of wet etching. Abstract from ВЗАИМОДЕЙСТВИЕ ИОНОВ С ПОВЕРХНОСТЬЮ ВИП-2019, Москва, Russian Federation.

BibTeX

@conference{95c28be4e2f842438fdb1d83d641a041,
title = "Helium ion irradiation for the fabrication of nanostructures by means of wet etching.",
author = "Yu.V. Petrov and E.A. Grigoryev and T.V. Sharov and A.P. Baraban",
year = "2019",
language = "English",
pages = "105--107",
note = "ВЗАИМОДЕЙСТВИЕ ИОНОВ С ПОВЕРХНОСТЬЮ ВИП-2019 ; Conference date: 19-08-2019 Through 23-08-2019",

}

RIS

TY - CONF

T1 - Helium ion irradiation for the fabrication of nanostructures by means of wet etching.

AU - Petrov, Yu.V.

AU - Grigoryev, E.A.

AU - Sharov, T.V.

AU - Baraban, A.P.

PY - 2019

Y1 - 2019

M3 - Abstract

SP - 105

EP - 107

T2 - ВЗАИМОДЕЙСТВИЕ ИОНОВ С ПОВЕРХНОСТЬЮ ВИП-2019

Y2 - 19 August 2019 through 23 August 2019

ER -

ID: 78597935