Research output: Contribution to journal › Article › peer-review
Growth mechanism of nanodimensional vanadium dioxide on silicon surface obtained by ML-ALD method. / Osmolowskaya, O.; Smirnov, V.
In: Reviews on Advanced Materials Science, Vol. 27, No. 2, 2011, p. 184-188.Research output: Contribution to journal › Article › peer-review
}
TY - JOUR
T1 - Growth mechanism of nanodimensional vanadium dioxide on silicon surface obtained by ML-ALD method
AU - Osmolowskaya, O.
AU - Smirnov, V.
PY - 2011
Y1 - 2011
M3 - статья
VL - 27
SP - 184
EP - 188
JO - Reviews on Advanced Materials Science
JF - Reviews on Advanced Materials Science
SN - 1606-5131
IS - 2
ER -
ID: 5116244