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Growth mechanism of nanodimensional vanadium dioxide on silicon surface obtained by ML-ALD method
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peer-review
Department of General and Inorganic Chemistry
Department of Solid State Chemistry
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O. Osmolowskaya
V. Smirnov
Original language
Undefined
Pages (from-to)
184-188
Journal
Reviews on Advanced Materials Science
Volume
27
Issue number
2
State
Published -
2011
ID: 5116244