Standard

Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation. / Kukaev, Alexander ; Lukyanov, Dmitry ; Mikhailenko, Denis ; Safronov, Daniil ; Shevchenko , Sergey ; Venediktov, Vladimir ; Vlasov , Andrey .

In: Micromachines, Vol. 12, No. 1, 2021.

Research output: Contribution to journal › Article › peer-review

Harvard

Kukaev, A, Lukyanov, D, Mikhailenko, D, Safronov, D, Shevchenko , S, Venediktov, V & Vlasov , A 2021, 'Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation', Micromachines, vol. 12, no. 1.

APA

Kukaev, A., Lukyanov, D., Mikhailenko, D., Safronov, D., Shevchenko , S., Venediktov, V., & Vlasov , A. (2021). Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation. Micromachines, 12(1).

Vancouver

Kukaev A, Lukyanov D, Mikhailenko D, Safronov D, Shevchenko S, Venediktov V et al. Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation. Micromachines. 2021;12(1).

Author

Kukaev, Alexander ; Lukyanov, Dmitry ; Mikhailenko, Denis ; Safronov, Daniil ; Shevchenko , Sergey ; Venediktov, Vladimir ; Vlasov , Andrey . / Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation. In: Micromachines. 2021 ; Vol. 12, No. 1.

BibTeX

@article{8f96ef0bcbfe4f9fba1f9a63bb88cda8,
title = "Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation",
abstract = "Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.",
keywords = "solid-state microgyroscope, Surface acoustic waves, laser, topology, delay line",
author = "Alexander Kukaev and Dmitry Lukyanov and Denis Mikhailenko and Daniil Safronov and Sergey Shevchenko and Vladimir Venediktov and Andrey Vlasov",
note = "Kukaev, A.; Lukyanov, D.; Mikhailenko, D.; Safronov, D.; Shevchenko, S.; Venediktov, V.; Vlasov, A. Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation. Micromachines 2021, 12, 10.",
year = "2021",
language = "English",
volume = "12",
journal = "Micromachines",
issn = "2072-666X",
publisher = "MDPI AG",
number = "1",

}

RIS

TY - JOUR

T1 - Formation of complex topologies of saw-based inertial sensors by laser thin film local evaporation

AU - Kukaev, Alexander

AU - Lukyanov, Dmitry

AU - Mikhailenko, Denis

AU - Safronov, Daniil

AU - Shevchenko , Sergey

AU - Venediktov, Vladimir

AU - Vlasov , Andrey

N1 - Kukaev, A.; Lukyanov, D.; Mikhailenko, D.; Safronov, D.; Shevchenko, S.; Venediktov, V.; Vlasov, A. Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation. Micromachines 2021, 12, 10.

PY - 2021

Y1 - 2021

N2 - Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

AB - Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

KW - solid-state microgyroscope

KW - Surface acoustic waves

KW - laser

KW - topology

KW - delay line

UR - https://www.mdpi.com/2072-666X/12/1/10

M3 - Article

VL - 12

JO - Micromachines

JF - Micromachines

SN - 2072-666X

IS - 1

ER -

ID: 72624347