Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.
Original languageEnglish
Number of pages10
JournalMicromachines
Volume12
Issue number1
StatePublished - 2021

    Research areas

  • solid-state microgyroscope, Surface acoustic waves, laser, topology, delay line

    Scopus subject areas

  • Physics and Astronomy(all)

ID: 72624347