Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation. / Petrov, Yu V.; Ubyivovk, E. V.; Baraban, A. P.
State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. ed. / Yuri Petrov; Oleg Vyvenko. Vol. 2064 American Institute of Physics, 2019. 030012 (AIP Conference Proceedings; Vol. 2064).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
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TY - GEN
T1 - Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation
AU - Petrov, Yu V.
AU - Ubyivovk, E. V.
AU - Baraban, A. P.
PY - 2019/1/15
Y1 - 2019/1/15
N2 - We investigated the formation of nanopores in silicon nitride membrane by means of wet etching. The membrane was irradiated with focused helium ion beam using helium ion microscope, and then etched in hydrofluoric acid. Nanopores were investigated with transmission electron microscope. The pores with a diameter from 10 to 100 nm were obtained. Dependence of the pore diameter on the number of helium ions was investigated and compared with space distribution of radiation-induced defects, which was obtained from Monte-Carlo simulation.
AB - We investigated the formation of nanopores in silicon nitride membrane by means of wet etching. The membrane was irradiated with focused helium ion beam using helium ion microscope, and then etched in hydrofluoric acid. Nanopores were investigated with transmission electron microscope. The pores with a diameter from 10 to 100 nm were obtained. Dependence of the pore diameter on the number of helium ions was investigated and compared with space distribution of radiation-induced defects, which was obtained from Monte-Carlo simulation.
KW - SIO2
KW - IMPLANTATION
UR - http://www.scopus.com/inward/record.url?scp=85060546226&partnerID=8YFLogxK
UR - http://www.mendeley.com/research/fabrication-nanopores-silicon-nitride-membrane-means-wet-etching-enhanced-focused-helium-ion-beam-ir
U2 - 10.1063/1.5087674
DO - 10.1063/1.5087674
M3 - Conference contribution
AN - SCOPUS:85060546226
SN - 9780735417922
VL - 2064
T3 - AIP Conference Proceedings
BT - State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018
A2 - Petrov, Yuri
A2 - Vyvenko, Oleg
PB - American Institute of Physics
T2 - International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018
Y2 - 17 October 2018 through 19 October 2018
ER -
ID: 38366873