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Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation. / Petrov, Yu V.; Ubyivovk, E. V.; Baraban, A. P.

State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. ed. / Yuri Petrov; Oleg Vyvenko. Vol. 2064 American Institute of Physics, 2019. 030012 (AIP Conference Proceedings; Vol. 2064).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Harvard

Petrov, YV, Ubyivovk, EV & Baraban, AP 2019, Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation. in Y Petrov & O Vyvenko (eds), State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. vol. 2064, 030012, AIP Conference Proceedings, vol. 2064, American Institute of Physics, International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018, Moscow, Russian Federation, 17/10/18. https://doi.org/10.1063/1.5087674

APA

Petrov, Y. V., Ubyivovk, E. V., & Baraban, A. P. (2019). Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation. In Y. Petrov, & O. Vyvenko (Eds.), State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018 (Vol. 2064). [030012] (AIP Conference Proceedings; Vol. 2064). American Institute of Physics. https://doi.org/10.1063/1.5087674

Vancouver

Petrov YV, Ubyivovk EV, Baraban AP. Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation. In Petrov Y, Vyvenko O, editors, State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. Vol. 2064. American Institute of Physics. 2019. 030012. (AIP Conference Proceedings). https://doi.org/10.1063/1.5087674

Author

Petrov, Yu V. ; Ubyivovk, E. V. ; Baraban, A. P. / Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation. State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018. editor / Yuri Petrov ; Oleg Vyvenko. Vol. 2064 American Institute of Physics, 2019. (AIP Conference Proceedings).

BibTeX

@inproceedings{556194ae40b54edd8f28bc3109d07389,
title = "Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation",
abstract = "We investigated the formation of nanopores in silicon nitride membrane by means of wet etching. The membrane was irradiated with focused helium ion beam using helium ion microscope, and then etched in hydrofluoric acid. Nanopores were investigated with transmission electron microscope. The pores with a diameter from 10 to 100 nm were obtained. Dependence of the pore diameter on the number of helium ions was investigated and compared with space distribution of radiation-induced defects, which was obtained from Monte-Carlo simulation.",
keywords = "SIO2, IMPLANTATION",
author = "Petrov, {Yu V.} and Ubyivovk, {E. V.} and Baraban, {A. P.}",
year = "2019",
month = jan,
day = "15",
doi = "10.1063/1.5087674",
language = "English",
isbn = "9780735417922",
volume = "2064",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics",
editor = "Yuri Petrov and Oleg Vyvenko",
booktitle = "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018",
address = "United States",
note = "International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018 ; Conference date: 17-10-2018 Through 19-10-2018",

}

RIS

TY - GEN

T1 - Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation

AU - Petrov, Yu V.

AU - Ubyivovk, E. V.

AU - Baraban, A. P.

PY - 2019/1/15

Y1 - 2019/1/15

N2 - We investigated the formation of nanopores in silicon nitride membrane by means of wet etching. The membrane was irradiated with focused helium ion beam using helium ion microscope, and then etched in hydrofluoric acid. Nanopores were investigated with transmission electron microscope. The pores with a diameter from 10 to 100 nm were obtained. Dependence of the pore diameter on the number of helium ions was investigated and compared with space distribution of radiation-induced defects, which was obtained from Monte-Carlo simulation.

AB - We investigated the formation of nanopores in silicon nitride membrane by means of wet etching. The membrane was irradiated with focused helium ion beam using helium ion microscope, and then etched in hydrofluoric acid. Nanopores were investigated with transmission electron microscope. The pores with a diameter from 10 to 100 nm were obtained. Dependence of the pore diameter on the number of helium ions was investigated and compared with space distribution of radiation-induced defects, which was obtained from Monte-Carlo simulation.

KW - SIO2

KW - IMPLANTATION

UR - http://www.scopus.com/inward/record.url?scp=85060546226&partnerID=8YFLogxK

UR - http://www.mendeley.com/research/fabrication-nanopores-silicon-nitride-membrane-means-wet-etching-enhanced-focused-helium-ion-beam-ir

U2 - 10.1063/1.5087674

DO - 10.1063/1.5087674

M3 - Conference contribution

AN - SCOPUS:85060546226

SN - 9780735417922

VL - 2064

T3 - AIP Conference Proceedings

BT - State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018

A2 - Petrov, Yuri

A2 - Vyvenko, Oleg

PB - American Institute of Physics

T2 - International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2018

Y2 - 17 October 2018 through 19 October 2018

ER -

ID: 38366873