Research output: Contribution to journal › Conference article › peer-review
Extreme ultraviolet (EUV) radiation at the wavelength of around 13 nm was observed from a laser-produced plasma using continuous water-jet. Strong dependence of the conversion efficiency (CE) on the laser focal spot size and jet diameter was observed. The EUV CE at a given laser spot size and jet diameter was further enhanced using double laser pulses, where a pre-pulse was used for initial heating of the plasma.
| Original language | English |
|---|---|
| Article number | 116 |
| Pages (from-to) | 613-616 |
| Number of pages | 4 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5777 |
| Issue number | PART II |
| DOIs | |
| State | Published - 2005 |
| Event | XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, GCL/HPL 2004 - Prague, Czech Republic Duration: 30 Aug 2004 → 3 Sep 2004 |
ID: 85669962