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Energy filtration of secondary and backscattered electrons by the method of the retarding potential in scanning electron and ion microscopy
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Article
Department of Solid State Electronics
Overview
Cite this
DOI
https://doi.org/10.1134/S1027451014060378
Other version
V.Y. Mikhailovskii
Y.V. Petrov
O.F. Vyvenko
Original language
English
Pages (from-to)
196-202
Journal
Journal of Surface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume
9
Issue number
1
DOIs
https://doi.org/10.1134/S1027451014060378
State
Published -
2015
ID: 3927572