DOI

Electric levels of NiSi2 nanoprecipitates in n- and p-type Si were studied by means of deep level transient spectroscopy (DLTS) and minority carrier transient spectroscopy (MCTS) The shapes of MCTS spectra of as-quenched as well as annealed p-type samples were found to be similar whereas they differ qualitatively in n-type samples. Experimental results are discussed using energetic diagram of electrical levels of NiSi2 nanoprecipitates in the Si band gap.

Original languageEnglish
Pages (from-to)3056-3060
Number of pages5
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume4
Issue number8
DOIs
StatePublished - 2007
EventInternational Conference on Extended Defects in Semiconductors, EDS 2006 - Halle, Germany
Duration: 17 Sep 200622 Sep 2006

    Scopus subject areas

  • Condensed Matter Physics

ID: 87672893