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Electrical characterization of silicon wafer bonding interfaces by means of voltage dependent light beam and electron beam induced current and capacitance of Schottky diodes. / Trushin, M.; Vyvenko, O.; Mchedlidze, T.; Reiche, M.; Kittler, M.

In: Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 8, No. 4, 2011, p. 1371-1376.

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Author

Trushin, M. ; Vyvenko, O. ; Mchedlidze, T. ; Reiche, M. ; Kittler, M. / Electrical characterization of silicon wafer bonding interfaces by means of voltage dependent light beam and electron beam induced current and capacitance of Schottky diodes. In: Physica Status Solidi (C) Current Topics in Solid State Physics. 2011 ; Vol. 8, No. 4. pp. 1371-1376.

BibTeX

@article{99ea4fd425c94d769d4401e0e91ff5df,
title = "Electrical characterization of silicon wafer bonding interfaces by means of voltage dependent light beam and electron beam induced current and capacitance of Schottky diodes",
author = "M. Trushin and O. Vyvenko and T. Mchedlidze and M. Reiche and M. Kittler",
year = "2011",
doi = "DOI: 10.1002/pssc.201084029",
language = "не определен",
volume = "8",
pages = "1371--1376",
journal = "Physica Status Solidi C: Conferences",
issn = "1862-6351",
publisher = "Wiley-Blackwell",
number = "4",

}

RIS

TY - JOUR

T1 - Electrical characterization of silicon wafer bonding interfaces by means of voltage dependent light beam and electron beam induced current and capacitance of Schottky diodes

AU - Trushin, M.

AU - Vyvenko, O.

AU - Mchedlidze, T.

AU - Reiche, M.

AU - Kittler, M.

PY - 2011

Y1 - 2011

U2 - DOI: 10.1002/pssc.201084029

DO - DOI: 10.1002/pssc.201084029

M3 - статья

VL - 8

SP - 1371

EP - 1376

JO - Physica Status Solidi C: Conferences

JF - Physica Status Solidi C: Conferences

SN - 1862-6351

IS - 4

ER -

ID: 5476976