Research output: Contribution to journal › Article
Electrical characterization of silicon wafer bonding interfaces by means of voltage dependent light beam and electron beam induced current and capacitance of Schottky diodes. / Trushin, M.; Vyvenko, O.; Mchedlidze, T.; Reiche, M.; Kittler, M.
In: Physica Status Solidi (C) Current Topics in Solid State Physics, Vol. 8, No. 4, 2011, p. 1371-1376.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Electrical characterization of silicon wafer bonding interfaces by means of voltage dependent light beam and electron beam induced current and capacitance of Schottky diodes
AU - Trushin, M.
AU - Vyvenko, O.
AU - Mchedlidze, T.
AU - Reiche, M.
AU - Kittler, M.
PY - 2011
Y1 - 2011
U2 - DOI: 10.1002/pssc.201084029
DO - DOI: 10.1002/pssc.201084029
M3 - статья
VL - 8
SP - 1371
EP - 1376
JO - Physica Status Solidi C: Conferences
JF - Physica Status Solidi C: Conferences
SN - 1862-6351
IS - 4
ER -
ID: 5476976