The results are given of experimental and theoretical investigation of surface transport processes in the valence band of silicon in MIS transistor inversion channels.

Original languageEnglish
Pages (from-to)198-202
Number of pages5
JournalSoviet Microelectronics (English Translation of Mikroelektronika)
Volume8
Issue number3
StatePublished - 1 Jan 1979

    Scopus subject areas

  • Electrical and Electronic Engineering

ID: 42242993